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The semiconductor and electronic materials industry

Target, medical, semiconductor films and electronic materials solutions

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JSH A2 Grade (5N) of high purity silicon nitride powder.

JSH A2 Grade (5N) main indicators of high purity silicon nitride powder
ProjectUnitRange檢測標(biāo)準(zhǔn)或方法
N%> 39.6GB/T 16555-2008 / IGA
O%< 0.5ASTMC1494-2001 / IGA
C%< 0.15Leco method / IGA
Feppm wt< 2ICP Method / GDMS
Alppm wt< 1.5ICP Method / GDMS
Cappm wt< 1ICP Method / GDMS
Mgppm wt< 0.5ICP Method / GDMS
Mnppm wt< 0.5ICP Method / GDMS
Cuppm wt< 0.5ICP Method / GDMS
Pppm wt< 0.5ICP Method / GDMS
Sppm wt< 0.5ICP Method / GDMS
Bppm wt< 0.5ICP Method / GDMS
Si-free%< 0.05GB/T 16555-2008
Si3N4(aphar)%≥ 90XRD YB/T 5320-2006
D50um1.5±0.2GB/T 19077.1-2008